Vacuumpomp - Revision history

Thomas at 03:26, 28 December 2023

2023-12-28T03:26:34Z

@@ Line 3: / Line 3: @@
   |Picture=
   |Omschrijving= Rebuilding a vacuum pump
-  |Status=Completed
+  |Status=In progress
   |Contact=thomas
 }}
@@ Line 47: / Line 47: @@
 Here's a glass ampoule, with atmosphere evacuated to some fraction of standard pressure, then sealed and excited with high frequency/voltage AC:
 [[File:Plasma ampoule.mp4|540px|left]]

Thomas: /* Teardown / Rebuild */

2021-08-22T01:02:40Z

Teardown / Rebuild

← Older revision		Revision as of 01:02, 22 August 2021
Line 25:		Line 25:
	Shaftsealdriver.jpg\|Shaft seal driver. This tool makes it harder to screw up when installing new shaft seals.		Shaftsealdriver.jpg\|Shaft seal driver. This tool makes it harder to screw up when installing new shaft seals.
	Gas_ballast_seal.jpg\|Old gas ballast seal next to its replacement		Gas_ballast_seal.jpg\|Old gas ballast seal next to its replacement
			Restoredpumpmodule.jpg\|Restored pump module installed
	trivacfirsttest.mp4\|It runs!		trivacfirsttest.mp4\|It runs!
	</gallery>		</gallery>

Thomas at 23:07, 11 August 2021

2021-08-11T23:07:56Z

← Older revision		Revision as of 23:07, 11 August 2021
Line 44:		Line 44:


	Here's a glass ampoule, with atmosphere evacuated to ~~less than one thousandth~~ standard pressure, then sealed and excited with high frequency/voltage AC:		Here's a glass ampoule, with atmosphere evacuated to some fraction of standard pressure, then sealed and excited with high frequency/voltage AC:
	[[File:Plasma ampoule.mp4\|540px\|left]]		[[File:Plasma ampoule.mp4\|540px\|left]]

Thomas: /* Result */

2021-08-11T19:31:21Z

Result

← Older revision		Revision as of 19:31, 11 August 2021
Line 42:		Line 42:
	The pump reads around 2-3*10^-3 mbar on an MKS-901p transducer, and pretty much bottoms out a DV-23 thermocouple gauge, so it looks like it's back to pumping at factory specs.		The pump reads around 2-3*10^-3 mbar on an MKS-901p transducer, and pretty much bottoms out a DV-23 thermocouple gauge, so it looks like it's back to pumping at factory specs.
	Oh yeah, and it doesn't leak oil! Not even a little! Rebuild was successful.		Oh yeah, and it doesn't leak oil! Not even a little! Rebuild was successful.


	Here's a glass ampoule, with atmosphere evacuated to less than one thousandth standard pressure, then sealed and excited with high frequency/voltage AC:		Here's a glass ampoule, with atmosphere evacuated to less than one thousandth standard pressure, then sealed and excited with high frequency/voltage AC:


	[[File:Plasma ampoule.mp4\|540px\|left]]		[[File:Plasma ampoule.mp4\|540px\|left]]

Thomas at 19:31, 11 August 2021

2021-08-11T19:31:02Z

← Older revision		Revision as of 19:31, 11 August 2021
Line 40:		Line 40:
	== Result ==		== Result ==

	The pump reads around 2-3*10^-3 mbar on an MKS-901p transducer, and pretty much bottoms out a DV-23 thermocouple gauge, so it looks like it's back to pumping at factory specs. Oh yeah, and it doesn't leak oil! Not even a little! Rebuild was successful.		The pump reads around 2-3*10^-3 mbar on an MKS-901p transducer, and pretty much bottoms out a DV-23 thermocouple gauge, so it looks like it's back to pumping at factory specs.
			Oh yeah, and it doesn't leak oil! Not even a little! Rebuild was successful.

			Here's a glass ampoule, with atmosphere evacuated to less than one thousandth standard pressure, then sealed and excited with high frequency/voltage AC:


			[[File:Plasma ampoule.mp4\|540px\|left]]

Thomas at 21:43, 6 August 2021

2021-08-06T21:43:42Z

← Older revision		Revision as of 21:43, 6 August 2021
Line 3:		Line 3:
	\|Picture=		\|Picture=
	\|Omschrijving= Rebuilding a vacuum pump		\|Omschrijving= Rebuilding a vacuum pump
	\|Status=~~In progress~~		\|Status=Completed
	\|Contact=thomas		\|Contact=thomas
	}}		}}

Thomas: /* Result */

2021-08-06T21:43:17Z

Result

← Older revision		Revision as of 21:43, 6 August 2021
Line 40:		Line 40:
	== Result ==		== Result ==

	The pump reads around 2-3*10^-3 mbar on an MKS-901p transducer, and pretty much bottoms out a DV-23 thermocouple gauge, so it looks like it's back to pumping at factory specs.		The pump reads around 2-3*10^-3 mbar on an MKS-901p transducer, and pretty much bottoms out a DV-23 thermocouple gauge, so it looks like it's back to pumping at factory specs. Oh yeah, and it doesn't leak oil! Not even a little! Rebuild was successful.

Thomas: /* Result */

2021-08-06T21:41:34Z

Result

← Older revision		Revision as of 21:41, 6 August 2021
Line 40:		Line 40:
	== Result ==		== Result ==

	The pump reads around 2-3*10^-3 mbar ~~range~~ on an MKS-901p transducer, and pretty much bottoms out a DV-23 thermocouple gauge, so it looks like it's back to pumping at factory specs.		The pump reads around 2-3*10^-3 mbar on an MKS-901p transducer, and pretty much bottoms out a DV-23 thermocouple gauge, so it looks like it's back to pumping at factory specs.

Thomas at 21:39, 6 August 2021

2021-08-06T21:39:57Z

← Older revision		Revision as of 21:39, 6 August 2021
Line 37:		Line 37:
	*Find the silencer nozzle on the detailed diagram and unclog that bastard. I am 99% sure this was the cause of the noise that prompted the rebuild. Its job is to inject a tiny bit of air into the second stage vane chamber, to keep it from making excessive noise ("oil slap") when the pump reaches final pressure. The orifice is incredibly small. I used a thread from some stranded wire to unclog it. Be careful though, it is made of aluminium for some reason.		*Find the silencer nozzle on the detailed diagram and unclog that bastard. I am 99% sure this was the cause of the noise that prompted the rebuild. Its job is to inject a tiny bit of air into the second stage vane chamber, to keep it from making excessive noise ("oil slap") when the pump reaches final pressure. The orifice is incredibly small. I used a thread from some stranded wire to unclog it. Be careful though, it is made of aluminium for some reason.
	*Reassembling the pump module is both straight-forward and terrifying, thanks to the pin fittings (which took quite some carefully applied force to place). There is really only one order of assembly possible, starting with the segment containing the oil pump and the inner shaft seal. At each assembly step where one segment had to be mounted on another, I first drove the pins through the upper segment, separate from the stack, on a piece of silicone rubber, to where the conical end of the pin protruded slightly through to the other side. This makes it easier to align segments correctly when you place them on the stack and then drive the pins home. I did have one occasion where the pin fittings came loose and a gap appeared between the segments. Very careful tapping with a rubber mallet and protective silicone rubber helped sort this out (i hope). Make sure to lubricate every moving part/surface liberally before closing up as you go along towards the back of the pump module, so that it doesn't run dry during first startup.		*Reassembling the pump module is both straight-forward and terrifying, thanks to the pin fittings (which took quite some carefully applied force to place). There is really only one order of assembly possible, starting with the segment containing the oil pump and the inner shaft seal. At each assembly step where one segment had to be mounted on another, I first drove the pins through the upper segment, separate from the stack, on a piece of silicone rubber, to where the conical end of the pin protruded slightly through to the other side. This makes it easier to align segments correctly when you place them on the stack and then drive the pins home. I did have one occasion where the pin fittings came loose and a gap appeared between the segments. Very careful tapping with a rubber mallet and protective silicone rubber helped sort this out (i hope). Make sure to lubricate every moving part/surface liberally before closing up as you go along towards the back of the pump module, so that it doesn't run dry during first startup.

			== Result ==

			The pump reads around 2-3*10^-3 mbar range on an MKS-901p transducer, and pretty much bottoms out a DV-23 thermocouple gauge, so it looks like it's back to pumping at factory specs.

Thomas at 08:33, 26 July 2021

2021-07-26T08:33:36Z

← Older revision		Revision as of 08:33, 26 July 2021
Line 36:		Line 36:
	* If the vanes seem a bit loose when dry, like they have too much play in the rotor slots and wobble around a bit, don't worry. Once there is an oil film between the vanes and the rotor surfaces, they'll be just fine.		* If the vanes seem a bit loose when dry, like they have too much play in the rotor slots and wobble around a bit, don't worry. Once there is an oil film between the vanes and the rotor surfaces, they'll be just fine.
	*Find the silencer nozzle on the detailed diagram and unclog that bastard. I am 99% sure this was the cause of the noise that prompted the rebuild. Its job is to inject a tiny bit of air into the second stage vane chamber, to keep it from making excessive noise ("oil slap") when the pump reaches final pressure. The orifice is incredibly small. I used a thread from some stranded wire to unclog it. Be careful though, it is made of aluminium for some reason.		*Find the silencer nozzle on the detailed diagram and unclog that bastard. I am 99% sure this was the cause of the noise that prompted the rebuild. Its job is to inject a tiny bit of air into the second stage vane chamber, to keep it from making excessive noise ("oil slap") when the pump reaches final pressure. The orifice is incredibly small. I used a thread from some stranded wire to unclog it. Be careful though, it is made of aluminium for some reason.
	*Reassembling the pump module is both straight-forward and terrifying, thanks to the pin fittings (which took quite some carefully applied force to place). There is really only one order of assembly possible, starting with the segment containing the oil pump and the inner shaft seal. At each assembly step where one segment had to be mounted on another, I first drove the pins through the upper segment, separate from the stack, on a piece of silicone rubber, to where the conical end of the pin protruded slightly. This makes it easier to align ~~the~~ segments correctly when you place them on the stack and then drive the pins home. I did have one occasion where the pin fittings came loose and a gap appeared between the segments. Very careful tapping with a rubber mallet and protective silicone rubber helped sort this out (i hope). Make sure to lubricate every moving part/surface liberally before closing up as you go along towards the back of the pump module, so that it doesn't run dry during first startup.		*Reassembling the pump module is both straight-forward and terrifying, thanks to the pin fittings (which took quite some carefully applied force to place). There is really only one order of assembly possible, starting with the segment containing the oil pump and the inner shaft seal. At each assembly step where one segment had to be mounted on another, I first drove the pins through the upper segment, separate from the stack, on a piece of silicone rubber, to where the conical end of the pin protruded slightly through to the other side. This makes it easier to align segments correctly when you place them on the stack and then drive the pins home. I did have one occasion where the pin fittings came loose and a gap appeared between the segments. Very careful tapping with a rubber mallet and protective silicone rubber helped sort this out (i hope). Make sure to lubricate every moving part/surface liberally before closing up as you go along towards the back of the pump module, so that it doesn't run dry during first startup.

← Older revision		Revision as of 01:02, 22 August 2021
Line 25:		Line 25:
	Shaftsealdriver.jpg\|Shaft seal driver. This tool makes it harder to screw up when installing new shaft seals.		Shaftsealdriver.jpg\|Shaft seal driver. This tool makes it harder to screw up when installing new shaft seals.
	Gas_ballast_seal.jpg\|Old gas ballast seal next to its replacement		Gas_ballast_seal.jpg\|Old gas ballast seal next to its replacement
			Restoredpumpmodule.jpg\|Restored pump module installed
	trivacfirsttest.mp4\|It runs!		trivacfirsttest.mp4\|It runs!
	</gallery>		</gallery>